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Fujitsu Launches World's First 90-Nanometer LSI Process Pilot Production Line at Akiruno Technology Center
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Fujitsu Launches World's First 90-Nanometer LSI Process Pilot Production Line at Akiruno Technology Center

Tokyo, March 29, 2002 - Fujitsu Limited today announced that it has begun prototype production of cutting-edge 90-nanometer(*) LSI semiconductor devices at its Akiruno Technology Center. The pathbreaking accomplishment utilizes a new clean room installed in December that employs a fully modular contamination control system.

Aiming to accelerate the commercialization of products and strengthen Fujitsu's R&D capabilities, Fujitsu has positioned the Akiruno Technology Center as a market-driven development center, consolidating into one location all aspects of its 90-nanometer chip development activities - from basic research to product planning, design, and pilot production. Engineers involved in these development efforts formerly at Fujitsu's Atsugi Technical Center (basic research), Kawasaki research and manufacturing facilities (product planning and design) and Mie Plant (pilot production) have all been assembled in Akiruno since October of last year. In addition, to enhance synergy that will help strengthen its technology and product development capability moving toward commercial shipments of leading-edge LSI products from fiscal 2002, the company plans to bring together staff from its information processing and telecommunications divisions at Akiruno.

In order to swiftly respond to the increasingly diverse needs of advanced LSI devices, the Center's new clean room facility uses a modular contamination control method that provides the flexibility to quickly supplement or modify existing production lines. As a result, new equipment can be installed while other equipment is being used, and Fujitsu was able to reduce from six to four months the time required to make the clean room operational from the start of construction. In addition to greater speed and flexibility, the use of this modular method serves to significantly cut operational costs.

Fujitsu's cutting-edge 90-nanometer chip technology offers superior speed, reliability and energy-saving features. Products employing this technology will propel the advancement of the broadband Internet, helping safeguard consumer and corporate data and enabling high-speed processing of large quantities of data, such as video images. To respond to the diverse needs of the marketplace in such fields as electronic government, medicine, education and communications, Fujitsu is committed to working with its customers to rapidly develop advanced chips to drive high-performance servers, network equipment, mobile phones, PDAs and digital A/V equipment.

Leveraging its integrated semiconductor development, design and sales locations in Japan, the U.S., Europe and Asia, with the Akiruno Technology Center as the core, Fujitsu will continue to serve as a leading provider of the most advanced semiconductor products for the global marketplace.

Akiruno Technology Center at a Glance

Location : 50 Fuchigami, Akiruno City, Tokyo, Japan
Employees : Approximately 2,300
Commencement of operations : Product development, design from July 2000
Basic R&D, pilot production from December 2001
Total site area : 122,000m2
Buildings : Development Building (8 floors, building footprint of about 3,200m2)
Process Building (5 floors, building footprint of about 6,200m2; clean room area of about 4,000m2)
Administration & Technology Building (3 floors, building footprint of about 3,000m2)
Power Plant (4 floors, building footprint of about 3,700m2)
New administrative building (3 floors, building footprint of about 2,000m2) to be completed December 2002.
Planned production capacity : Max. 5,000 wafers/month (8-inch wafers)
Planned total capital investment : About 90 billion yen (fiscal years 2001 - 2004)
Products : 90-nanometer and finer advanced LSI devices
Main applications : Network equipment, IT equipment, digital A/V equipment, mobile devices, etc.

* Based on ITRS (International Technology Roadmap for Semiconductors) process technology generation definition. 90 nanometers = 0.09 micrometer.

About Fujitsu
Fujitsu is a leading provider of Internet-focused information technology solutions for the global marketplace. Its pace-setting technologies, best-in-class computing and telecommunications platforms, and worldwide corps of systems and services experts make it uniquely positioned to unleash the infinite possibilities of the Internet to help its customers succeed. Headquartered in Tokyo, Fujitsu Limited (TSE:6702) reported consolidated revenues of 5.48 trillion yen for the fiscal year ended March 31, 2001. Internet:
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Chiaki Kuwahara, Nancy Ikehara
Fujitsu Limited, Public Relations
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